Time Resolved Scanning Electron Microscopy: Concepts, Instrumentation, and Applications
QCMD Seminar
- Datum: 25.03.2026
- Uhrzeit: 14:00 - 15:00
- Vortragender: Joel Rehmann
- ETH Zürich
- Ort: MPSD Bldg. 900
- Raum: Seminar Room EG.136
- Rubrik: Vorträge
Dynamic phenomena at the micro- and nanoscale underpin technologies ranging from precision sensing and
quantum instrumentation to communication hardware and MEMS/NEMS actuators. The scanning electron microscope (SEM) is one of the most versatile tools for imaging micro- and nanostructures with high spatial resolution.
Here we present the development of two new methods to observe dynamics in micro- and nanostructures with SEMs. The first method allows the imaging of picosecond dynamics in semiconductors by pairing electron-beam-induced current measurements (EBIC) with a photocathode-driven ultrafast SEM. This enables the direct imaging of charge-carrier dynamics in semiconductor devices that were previously inaccessible. The second method provides access to millisecond-to-nanosecond dynamics through the development of a time-tagging secondary-electron detector that can be added to a stock SEM with a continuous electron beam. This system allows recording of movies of NEMS and MEMS devices with effective frame rates up to 10⁹ frames per second without compromising the microscope’s spatial resolution.
quantum instrumentation to communication hardware and MEMS/NEMS actuators. The scanning electron microscope (SEM) is one of the most versatile tools for imaging micro- and nanostructures with high spatial resolution.
Here we present the development of two new methods to observe dynamics in micro- and nanostructures with SEMs. The first method allows the imaging of picosecond dynamics in semiconductors by pairing electron-beam-induced current measurements (EBIC) with a photocathode-driven ultrafast SEM. This enables the direct imaging of charge-carrier dynamics in semiconductor devices that were previously inaccessible. The second method provides access to millisecond-to-nanosecond dynamics through the development of a time-tagging secondary-electron detector that can be added to a stock SEM with a continuous electron beam. This system allows recording of movies of NEMS and MEMS devices with effective frame rates up to 10⁹ frames per second without compromising the microscope’s spatial resolution.